Departmental Seminar

Laser annealing of semiconductors: what we learned 35 years ago and why it still matters today

Professor George Cellar
Rutgers University, New Brunswick, NJ, USA

After reviewing some basic physical concepts related to laser annealing, this presentation reviews the exciting early days of laser annealing, covering the people, the timeline, controversies and research environment, with a focus on Bell labs.  It outlines the good science that came out of the excitement and the impact that this research has had on current advanced semiconductor manufacturing such as: rapid thermal annealing (RTA), active matrix liquid crystal displays (AMLCDs), silicon on insulator (SOI), laser processing and flash lamp annealing. 

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