Electron microscopy is a powerful tool for materials research. Significant progress has been achieved in electron optics, electron gun design within the last two decades opening up new opportunities for exploring the science of “small things”. This talk will give an introduction to the electron microscopy techniques for imaging and the information that we can extract from it. Semiconductors are the building blocks of the devices that we use in our everyday life and an important technological industry, evolving very fast and requiring more stringent precision and purity. I will review in this talk some of the research highlights where transmission electron microscopy has been an important technique for understanding our semiconductor nanostructures in as grown semiconductor structures and implanted semiconductors.

Jenny Wong-Leung’s interest in electron microscopy started as a physics honours student at the University of Bristol, UK. She completed her PhD studies in 1997 on “The gettering of metals in silicon to defects induced by ion implantation”. Through the ARC postdoctoral fellowship (1998-2001) and the ARC QEII fellowship (2002-2008), she has pursued many electron microscopy studies in a range of semiconductors Si, SiC, GaAs, InAs, AlGaAs, InP, ZnO etc. Her current research interests are electron microscopy of semiconductor nanowires and ion implantation effects in ZnO. She currently holds a joint position between the Centre for Advanced Microscopy and the Research School of Physics and Engineering at the ANU.