Dr Mark Lockrey

Dr Mark Lockrey
Position
Microanalysis Research Officer
Department
Department of Electronic Materials Engineering
Office phone
59638
Email
Office
Leonard Huxley 4 04

Singling out the depletion region in semiconductor devices by scanning electron microscopy

Scanning electron microscopy is a powerful tool for materials and this method is believed to correctly identify depletion regions in semiconductor devices. This project links the electron microscopy contrast  to the depletion regions measured by capacitance-voltage measurements in some devices with an aim to understanding the source of contrast. 

A/Prof Jennifer Wong-Leung, Dr Mark Lockrey

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