Nano optoelectronic devices feature complex functionalities that can convert light energy to electrical energy and vice versa at nanoscale. Novel fabrication methodology facilitates the high-performance nanodevices. To date, a plenty of nanofabrication techniques, classified as “top-down” and “bottom-up” methods have been established, including electron beam lithography, focused ion beam milling, lasers interference lithography, self-assembly, two-photon polymerization and direct laser writing/printing. Nevertheless, it is always the aim for researchers to promote widespread uptake of nano optoelectronic devices for higher efficiency, lower cost and easy operation. Recently, our group have marched new results on nano-optoelectronic nanodevices. Here, two representative works will be discussed. First, an all-fiber electro-optic modulator (EOM) is demonstrated. By using fiber-based FIB and EBL technologies, a lumped EOM device is integrated on the endfaces of a single-mode optical fiber jumper for fast amplitude modulations. Profiting from ultrathin plasmonic metasurfaces, nanofabrication-friendly EO polymers and coupling-free connections with fiber circuits, our metafiber EOM is verified to allow tunable dual-band operations in telecom O band and S band and the modulation speed can reach as high as 1GHz with a bias voltage of ± 9 V, which is the best performance for lumped fiber-integrated EOMs. In addition, benefiting from the advantages of femtosecond laser, such as ultrafast time scale and ultrahigh peak power, the nonthermal processing of almost all materials with low lateral damage has been demonstrated. We introduce an example that utilizes femtosecond laser to modify super-hard and brittle materials. By utilizing the femtosecond lasers, colors are generated on the surface of hybrid films that consist of the titanium nitride and aluminum nitride titanium. This surface coloring effect achieves a new inkless-printing technique with advantages of wide gamut, high resolution, durable, and non-iridescence. In summary, our works enrich the nanofabrication paradigm and offer an avenue to realize high-performance nano optoelectronic systems.

Prof. Min Qiu received a B.Sc. in Physics in 1995 and a Ph.D.in Condense Matter Physics in 1999, both from Zhejiang University, China. He received his second Ph.D. in Electromagnetic Theory from the Royal Institute of Technology (KTH), Sweden, in 2001. Since 2018, he has been the Chair Professor of Photonics and Vice President for Research, Westlake University, China.  Prof. Min Qiu is currently editor-in-chief of PhotoniX (Springer Nature), a topical editor of Light: Science and Applications (Springer Nature), and an associate editor of Science Bulletin (Science China Press). His current research focuses on micro- and nano-optoelectronics, including micro- & nano-fabrication and instrument equipment, theory of micro- & nano-photonics and optoelectronic devices, as well as the key theories and technologies for intelligent applications. To honour his contributions to nanophotonic devices, Prof. Qiu was elected to the director-at-large on the Board of Directors of Optica, and a fellow of the SPIE, IEEE, COS, CSOE and CIE.