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The Australian National University
Electronic Materials Engineering
Research School of Physics and Engineering
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1.7MV Tandem High Energy Ion Implanter

A high current, high-energy NEC tandem accelerator for ion-implantation and ion-beam modification of materials research. This machine uses a SNICS II ion source to produce negative ions. These are mass analyzed and accelerated to the terminal potential (maximum 1.7 MV) before passing through a gas stripper to produce a range of positive ions for subsequent acceleration. Selected ions are electrostatically scanned over a defined area on the sample. Samples can be heated or cooled during irradiation.

Equipment description (local access only)
Instructions for use (local access only)